Pod clamping unit load port equipped with pod clamping unit...

Details Pod clamping unit load port equipped with pod clamping unit... Pod clamping unit load port equipped with pod clamping unit...

2011-04-19

2011-04-19

Keenan, James (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C414S411000, C414S940000

Reexamination Certificate

active

07927058

ABSTRACT:
The invention is directed to a pod clamping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and a lid, the load port having a pod opener that opens/closes the lid. The pod clamping unit includes a clamp portion that is provided on the support table and adapted to engage with a first engagement portion provided on a lower surface of the pod body to restrict upward movement of the pod relative to the support table, a restriction pin that is movable upwardly and downwardly relative to the support table and adapted to engage with a second engagement portion provided on the lower surface of the pod body to restrict movement of the pod in a disengaging direction that causes disengagement between the first engagement portion and the clamp portion, and a vertically driving portion that moves the restriction pin up to/down from the second engagement portion.

REFERENCES:
patent: 5137063 (1992-08-01), Foster et al.
patent: 5302078 (1994-04-01), Essick et al.
patent: 6501070 (2002-12-01), Bacchi et al.
patent: 7467919 (2008-12-01), Weaver
patent: 7621714 (2009-11-01), Miyajima et al.
patent: 7793906 (2010-09-01), Natsume
patent: 2002/0044859 (2002-04-01), Lee et al.
patent: 2002/0051701 (2002-05-01), Saeki et al.
patent: 2004/0127048 (2004-07-01), Okabe et al.
patent: 2005/0095098 (2005-05-01), Miyajima et al.
patent: 54-152594 (1979-11-01), None
patent: 7-183354 (1995-07-01), None
patent: 2000-16583 (2000-01-01), None
patent: 3076831 (2001-01-01), None
patent: 2002-164412 (2002-06-01), None
patent: 2004-296646 (2004-10-01), None
patent: 2005-129706 (2005-05-01), None
patent: 2005-209891 (2005-08-01), None
patent: 10-0583726 (2006-05-01), None

Affiliated with

Also associated with

Rating

Pod clamping unit load port equipped with pod clamping unit... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pod clamping unit load port equipped with pod clamping unit..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pod clamping unit load port equipped with pod clamping unit... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2660391