Pnictide trap for vacuum systems

Details Pnictide trap for vacuum systems Pnictide trap for vacuum systems

1986-07-16

1988-05-24

Doll, John

Chemistry of inorganic compounds

Phosphorus or compound thereof

Elemental phosphorus

423210, 423659, B01D 310

Patent

active

047465000

ABSTRACT:
A fore line trap is located before the forepump in a vacuum system. The trap utilizes a cracker, which may be a heated filament or a plasma, and cold walls. The cracker cracks pnictide gas species such as P.sub.4 into other species such as P.sub.2 which have a higher sticking co-efficient. The pnictides are deposited on the cold walls. The cold walls preferably comprise a sleeve which may be removed from the trap and replaced by a clean one.

REFERENCES:
patent: 4355010 (1982-10-01), Jodden et al.
Matvay, Reissue 25,858 issued 9-21-65.
Melville and Gray, The Polymerization of Phosphorus, Trans. Faraday Sa. 32,271 (1936), pp. 271-285.

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