Pnictide trap for vacuum systems

Details Pnictide trap for vacuum systems Pnictide trap for vacuum systems

1984-02-17

1986-09-23

Lacey, David L.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Waste gas purifier

422187, 422202, 422244, 118723, F01N 310

Patent

active

046134859

ABSTRACT:
The present invention provides a trap for a vapor species, particularly a pnictide.sub.4 vapor species, for a vacuum system of the type including a vacuum chamber communicating with a forepump through a vacuum line. The trap may be positioned within the vacuum chamber itself, or in the alternative, the trap may be located between the vacuum chamber and the forepump. The trap includes a housing for a cracker, which may be a heated filament or a plasma, which cracks the pnictide vapor species into pnictide.sub.2. The walls of the housing are cooled so that the trapped pnictide species readily forms a film and adheres to the walls of the housing. The pnictide.sub.4 vapor species, which may be harmful to the operation of a forepump, is prevented from entering the forepump. A removable sleeve can be positioned in the housing so that the cracked species adheres to it. The sleeve may be removed from the housing for maintenance and replacement purposes. When the trap is located within the vacuum chamber itself, it also functions to reduce background pnictide.sub.4 pressure in that chamber.

REFERENCES:
patent: Re25858 (1965-09-01), Matvay
patent: 2203554 (1940-06-01), Uhri, Jr. et al.
patent: 3024009 (1962-03-01), Booth, Jr. et al.
patent: 3287434 (1966-11-01), Stanton et al.
patent: 3617226 (1971-11-01), List et al.
patent: 4357303 (1982-11-01), Hodson
patent: 4508931 (1985-04-01), Michel et al.
Melville and Gray, The Polymerisation of Phosphorus, Trans. Faraday Sa. 32, 271 (1936) pp. 271-285.

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