Pneumatic vibration isolator utilizing an elastomeric...

Supports – Resilient support – Including spring zone understructure

Reexamination Certificate

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C248S636000

Reexamination Certificate

active

06619611

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a vibration isolator that can dampen payload movement in both vertical and horizontal directions.
2. Background Information
Vibration isolators are used to isolate and damp vibration loads on an adjoining structure that is commonly referred to as a payload. The payload may be a table that is part of a semiconductor wafer fabrication system. The payload may be subjected to shock/vibration loads in both a vertical direction and a horizontal direction. For this reason vibration isolators are designed to dampen energy applied in both the vertical and horizontal directions.
U.S. Pat. No. 3,784,146 issued to Matthews discloses a vibration isolator which contains a piston that is coupled to a support plate by a plurality of cables. The piston is located within an air cylinder that can dampen vertical shock/vibration loads applied by the payload.
The cables allow the support plate to move within an inner cavity of the piston. The piston inner cavity includes a damping fluid that dampens shock/vibration loads applied in the horizontal direction.
It has been found that the damping oil will sometimes leak, thereby requiring a repair or replacement of the vibration isolator. Leaking fluid may therefore reduce the effective life of the isolator. Additionally, having to seal and charge a vibration isolator with damping fluid increases the cost of mass producing the isolator.
BRIEF SUMMARY OF THE INVENTION
One embodiment of the present invention includes a vibration isolator that has an elastomer, which couples a support plate to a piston. The piston can move within an inner chamber of an isolator housing.


REFERENCES:
patent: 1143165 (1915-06-01), Begusch
patent: 1306906 (1919-06-01), Jaques, Sr.
patent: 2367139 (1945-01-01), Ress
patent: 3357268 (1967-12-01), Richter
patent: 3442475 (1969-05-01), Rivin
patent: 3460786 (1969-08-01), Rivin
patent: 3478608 (1969-11-01), Met
patent: 3533012 (1970-10-01), Johnson et al.
patent: 3565515 (1971-02-01), De Mey, II
patent: 3577791 (1971-05-01), Vanden Broek
patent: 3578278 (1971-05-01), Pickering
patent: 3601476 (1971-08-01), MacKenzie
patent: 3620558 (1971-11-01), MacMillan
patent: 3667525 (1972-06-01), Spieth
patent: 3751025 (1973-08-01), Beery et al.
patent: 3917201 (1975-11-01), Roll
patent: 3945246 (1976-03-01), Wadensten
patent: 4030811 (1977-06-01), Khoe et al.
patent: 4065203 (1977-12-01), Goell et al.
patent: 4079404 (1978-03-01), Comerford et al.
patent: 4088396 (1978-05-01), Edelstein
patent: 4119363 (1978-10-01), Camlibel et al.
patent: 4144504 (1979-03-01), Leggett et al.
patent: 4164363 (1979-08-01), Hsu
patent: 4167744 (1979-09-01), Nyul
patent: 4199222 (1980-04-01), Ikushima et al.
patent: 4237474 (1980-12-01), Ladany
patent: 4268113 (1981-05-01), Noel, Jr.
patent: 4295152 (1981-10-01), Khoe et al.
patent: 4296998 (1981-10-01), Dufft
patent: 4316678 (1982-02-01), F'Geppert
patent: 4332469 (1982-06-01), Wendland
patent: 4350867 (1982-09-01), Kinoshita et al.
patent: 4355323 (1982-10-01), Kock
patent: 4357072 (1982-11-01), Goodfellow et al.
patent: 4387956 (1983-06-01), Cline
patent: 4403243 (1983-09-01), Hakamada
patent: 4435037 (1984-03-01), Abramson et al.
patent: 4469399 (1984-09-01), Cowen et al.
patent: 4469929 (1984-09-01), Rosen et al.
patent: 4479698 (1984-10-01), Landis et al.
patent: 4500165 (1985-02-01), Scholl et al.
patent: 4506108 (1985-03-01), Kersch et al.
patent: 4523802 (1985-06-01), Sakaguchi et al.
patent: 4523810 (1985-06-01), Goss et al.
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4550410 (1985-10-01), Chenausky et al.
patent: 4615031 (1986-09-01), Eales et al.
patent: 4623220 (1986-11-01), Grabbe et al.
patent: 4647147 (1987-03-01), Pikulski et al.
patent: 4647331 (1987-03-01), Koury, Jr. et al.
patent: 4657429 (1987-04-01), Morris
patent: 4664732 (1987-05-01), Campbell et al.
patent: 4673244 (1987-06-01), Miles
patent: 4673245 (1987-06-01), Kling et al.
patent: 4677290 (1987-06-01), Mitch
patent: 4678271 (1987-07-01), Beaulieu
patent: 4679908 (1987-07-01), Goodwin
patent: 4701013 (1987-10-01), Jurczyszyn et al.
patent: 4702556 (1987-10-01), Ishii et al.
patent: 4708429 (1987-11-01), Clark et al.
patent: 4714315 (1987-12-01), Krause
patent: 4720163 (1988-01-01), Goodwin et al.
patent: 4746195 (1988-05-01), Auracher et al.
patent: 4747657 (1988-05-01), Chaoui et al.
patent: 4748632 (1988-05-01), Preston
patent: 4759600 (1988-07-01), Caron et al.
patent: 4763979 (1988-08-01), Heywang
patent: 4767174 (1988-08-01), Carenco et al.
patent: 4768759 (1988-09-01), Bellamy et al.
patent: 4773730 (1988-09-01), Sedlmayr
patent: 4779946 (1988-10-01), Pimpinella et al.
patent: 4779959 (1988-10-01), Saunders
patent: 4782223 (1988-11-01), Suzuki
patent: 4787691 (1988-11-01), Lorenzo et al.
patent: 4800262 (1989-01-01), Lentine
patent: 4807750 (1989-02-01), Ryder et al.
patent: 4823220 (1989-04-01), Milster et al.
patent: 4837768 (1989-06-01), Schmid
patent: 4842397 (1989-06-01), Eisler
patent: 4850261 (1989-07-01), Greene
patent: 4850671 (1989-07-01), Finzel
patent: 4854667 (1989-08-01), Ebata et al.
patent: 4913527 (1990-04-01), Jessop
patent: 4914867 (1990-04-01), Saito et al.
patent: 4915482 (1990-04-01), Collins et al.
patent: 4916635 (1990-04-01), Singer et al.
patent: 4938564 (1990-07-01), Romero
patent: 4966474 (1990-10-01), Geiger
patent: 4978910 (1990-12-01), Knox et al.
patent: 4988159 (1991-01-01), Turner et al.
patent: 4988165 (1991-01-01), Ishii et al.
patent: 5000415 (1991-03-01), Sandercock
patent: 5044719 (1991-09-01), Nakamura
patent: 5058124 (1991-10-01), Cameron et al.
patent: 5062012 (1991-10-01), Maeda et al.
patent: 5068749 (1991-11-01), Patel
patent: 5077747 (1991-12-01), Hemmer et al.
patent: 5132824 (1992-07-01), Patel et al.
patent: 5138496 (1992-08-01), Pong
patent: 5140470 (1992-08-01), Luecke
patent: 5146532 (1992-09-01), Hodge
patent: 5150236 (1992-09-01), Patel
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5179618 (1993-01-01), Anton
patent: 5183350 (1993-02-01), Kramer
patent: 5189725 (1993-02-01), Bensel, III et al.
patent: 5191587 (1993-03-01), Hanson et al.
patent: 5194993 (1993-03-01), Bedzyk
patent: 5214735 (1993-05-01), Henneberger et al.
patent: 5218258 (1993-06-01), Shirasu et al.
patent: 5218610 (1993-06-01), Dixon
patent: 5219051 (1993-06-01), Davis
patent: 5251863 (1993-10-01), Gossman et al.
patent: 5285995 (1994-02-01), Gonzalez et al.
patent: 5289559 (1994-02-01), Wilson
patent: 5300755 (1994-04-01), Nishitani et al.
patent: 5311278 (1994-05-01), Rosencher
patent: 5319435 (1994-06-01), Melle et al.
patent: 5321539 (1994-06-01), Hirabayashi et al.
patent: 5327061 (1994-07-01), Gullapalli
patent: 5337383 (1994-08-01), DeAngelis et al.
patent: 5367140 (1994-11-01), Jonaneh et al.
patent: 5410145 (1995-04-01), Coroy
patent: 5428225 (1995-06-01), Silva et al.
patent: 5428635 (1995-06-01), Zhiglinsky et al.
patent: 5434944 (1995-07-01), Kerry et al.
patent: 5434945 (1995-07-01), Burek et al.
patent: 5446519 (1995-08-01), Makinouchi
patent: 5460357 (1995-10-01), Stewart
patent: 5463647 (1995-10-01), Pan
patent: 5469265 (1995-11-01), Measures et al.
patent: 5499261 (1996-03-01), Welch et al.
patent: 5502598 (1996-03-01), Kimura et al.
patent: 5528718 (1996-06-01), Ray et al.
patent: 5530547 (1996-06-01), Arnold
patent: 5530785 (1996-06-01), Sakamoto et al.
patent: 5544725 (1996-08-01), Handke et al.
patent: 5553186 (1996-09-01), Allen
patent: 5558189 (1996-09-01), Beck
patent: 5563972 (1996-10-01), Krausse et al.
patent: 5564537 (1996-10-01), Shoureshi
patent: 5570444 (1996-10-01), Janssen et al.
patent: 5581077 (1996-12-01), Chirovsky et al.
patent: 5598500 (1997-01-01), Crespel et al.
patent: 5603387 (1997-02-01), Beard et al.
patent: 5617501 (1997-04-01), Miller et al.
patent: 5619609 (1997-04-01), Pan et al.
patent: 5638267 (1997-06-01), Singhose et al.
patent: 5638482 (1997-06-01), Winterhoff et al.
patent: 5653317 (1997-08-01), Wakui
patent: 5655045 (1997-08-01), Morlion et al.
patent: 5660255 (1997-08-01), Schubert et al.
patent: 5668906 (1997-09-01), Yamamura et al.
patent

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