Pneumatic support device with a controlled gas supply, and litho

Details Pneumatic support device with a controlled gas supply, and litho Pneumatic support device with a controlled gas supply, and litho

1998-06-10

2000-11-07

Adams, Russell

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, G03B 2760, G03B 2742

Patent

active

061444421

ABSTRACT:
Support device (53) provided with a first part (69) and a second part (71) which is supported relative to the first part by means of a gas spring (73) having a pressure chamber (75). A gas supply (117), which compensates for gas leakage from the pressure chamber (75) during operation, is connected to an intermediate space (119) which is in communication with the pressure chamber (75) via a pneumatic restriction (121). The gas pressure present in the intermediate space (119) is held as constant as possible during operation by means of a control loop (123), to prevent transmission of pressure fluctuations which are present in the gas supply (117) to the pressure chamber (75) as much as possible. Such pressure fluctuations are undesirable in the pressure chamber because they cause mechanical vibrations in the second part of the support device and the device to be supported. The support device is used in a lithographic device for the support of a frame (39) with respect to a base (37), the frame (39) supporting a focusing unit (5).

REFERENCES:
patent: 4044866 (1977-08-01), Ishida
patent: 4491160 (1985-01-01), Axthammer et al.
patent: 4786947 (1988-11-01), Kosugi et al.
patent: 4909488 (1990-03-01), Seibert et al.
patent: 5047965 (1991-09-01), Zlokovitz
patent: 5844664 (1998-12-01), Van Kimmenade
patent: 5844666 (1998-12-01), Van Engelen et al.
patent: 5877843 (1999-03-01), Takagi et al.
patent: 5892572 (1999-04-01), Nishi

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