Plenum arrangement

Details Plenum arrangement Plenum arrangement

1983-05-20

1984-12-25

Yuen, Henry C.

Heating

Work chamber having heating means

Work chamber having gaseous material supply or removal...

432194, 432152, F27B 504

Patent

active

044901100

ABSTRACT:
The present invention provides, among other things, a plenum which is formed around the hot zone chamber of a vacuum furnace and which has a common wall with the hot zone chamber. The present arrangement includes having a plurality of apertures formed in the common wall and a plurality of baffles, or deflecting means, secured to the common wall within the chamber of the plenum. The baffles, or deflecting means, are formed to be angular with respect to the common wall and each deflecting means is disposed and formed to deflect gas (in all likelihood, inert gas), passing through the plenum, into and through an associated aperture and thereby into the hot zone chamber. By using the baffles, the inert gas, which is fed into the hot zone chamber from the plenum, is so fed with improved and significant uniformity.

REFERENCES:
patent: 1651380 (1927-12-01), Dressler
patent: 2311350 (1943-02-01), Richardson
patent: 2548485 (1951-04-01), Lubbock
patent: 3537405 (1970-11-01), Verhoeven
patent: 3565410 (1971-02-01), Scherff
patent: 4212633 (1980-07-01), Krieder et al.
patent: 4280807 (1981-07-01), Smith, Jr. et al.
patent: 4325694 (1982-04-01), Bergman
patent: 4395832 (1983-08-01), Jones et al.

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