Platinum electrode structure for use in conjunction with ferroel

Details Platinum electrode structure for use in conjunction with ferroel Platinum electrode structure for use in conjunction with ferroel

1991-08-09

1992-11-17

Hille, Rolf

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

365 65, 365145, 365149, 361321, 257295, 257769, H01L 2966

Patent

active

051648083

ABSTRACT:
An improved ferroelectric structure and the method for making the same is disclosed. The improved structure reduces the fatigue problems encountered in ferroelectric capacitors while providing avoiding problems in depositing the ferroelectric material which have prevented other solutions to the fatigue problem from being effective. The improved ferroelectric structure also provides improved adhesion to the underlying substrate. The ferroelectric structure has a bottom electrode comprising a layer of PtO.sub.2 which is generated by depositing a layer of Platinum on a suitable substrate and then exposing the Platinum layer to an Oxygen plasma. The ferroelectric material is then deposited on the PtO.sub.2 layer.

REFERENCES:
patent: 3623030 (1971-11-01), Sawyer
patent: 4517486 (1985-05-01), Andrews
patent: 4831432 (1989-05-01), Hori et al.
patent: 4895812 (1990-01-01), Wang et al.
patent: 5003428 (1991-03-01), Shepherd
patent: 5005102 (1991-04-01), Larson
patent: 5031144 (1991-07-01), Persky
patent: 5046043 (1991-09-01), Miller et al.
patent: 5053917 (1991-10-01), Miyasaka et al.
patent: 5070026 (1991-12-01), Greenwald et al.

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