Platinum alloy using electrochemical deposition

Details Platinum alloy using electrochemical deposition Platinum alloy using electrochemical deposition

2007-11-27

2007-11-27

King, Roy (Department: 1742)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Depositing predominantly alloy coating

C205S123000

Reexamination Certificate

active

10667802

ABSTRACT:
The present invention is directed to methods and compositions for depositing a noble metal alloy onto a microelectronic workpiece. In one particular aspect of the invention, a platinum metal alloy is electrochemically deposited on a surface of the workpiece from an acidic plating composition. The plated compositions when combined with high-k dielectric material are useful in capacitor structures.

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