Plating method

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Contacting coating as it forms with solid member or material...

Reexamination Certificate

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C205S084000, C205S098000

Reexamination Certificate

active

07575664

ABSTRACT:
A cathode potential is applied to a conductive layer formed on a substrate having a depression pattern. A plating solution in electrical contact with an anode is supplied to the conductive layer to form a plating film on the conductive layer. At this time, the plating solution is supplied by causing an impregnated member containing the plating solution to face the conductive layer. Since the plating solution stays in the depression, a larger amount of plating solution is supplied than on the upper surface of the substrate, and the plating rate of the plating film in the depression increases. Consequently, the plating film can be preferentially formed in the depression such as a groove or hole.

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Notification of Reasons for Rejection from Japanese Patent Office mailed Aug. 19, 2008, in Japanese Application No. 1999-033234, and English translation thereof.
Notification of Reasons for Rejection mailed Mar. 17, 2009, in related Japanese Application No. JP 11-033234.

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