Plating cell with rotary wiper and megasonic transducer

Details Plating cell with rotary wiper and megasonic transducer Plating cell with rotary wiper and megasonic transducer

1997-10-20

1999-05-18

Gorgos, Kathryn

Electrolysis: processes, compositions used therein, and methods

Electroforming or composition therefor

Recording device

204263, 205148, C25D17/00;1/00

Patent

active

059048271

ABSTRACT:
A plating cell for plating a flat substrate employs a sparger to introduce a flow of electrolyte or other plating solution across the surface of the substrate to be plated. A fluid-powered rotary blade or wiper within the cathode chamber has a rotary blade with an edge spaced a small distance, preferably about three-eighths inch, from the substrate, and an annular turbine which rotates under a flow of the electrolytic fluid that is also being fed to the sparger. The rotary wiper is run at a speed between about 35 and 80 rpm and draws the electrolyte away from the substrate. This helps remove hydrogen bubbles that form during electroplating. In addition, a megasonic transducer applies megasonic acoustic energy to the solution, e.g., at 0.2 to 5 MHz.

REFERENCES:
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patent: 4322281 (1982-03-01), Wright et al.
patent: 4342635 (1982-08-01), Becker et al.
patent: 4391694 (1983-07-01), Runsten
patent: 4599159 (1986-07-01), Hilbig
patent: 4686014 (1987-08-01), Pellegrino et al.
patent: 5409594 (1995-04-01), Al-Jibory et al.
patent: 5462649 (1995-10-01), Keeney et al.
patent: 5472592 (1995-12-01), Lowery
patent: 5514258 (1996-05-01), Brinket et al.
patent: 5683564 (1997-11-01), Reynolds

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