Plating cell and plating method with fluid wiper

Electrolysis: processes – compositions used therein – and methods – Electroforming or composition therefor – Recording device

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Details

204212, 204238, 204264, 204273, 205 70, 205 99, 205148, C25D 1702, C25D 2110

Patent

active

056835647

ABSTRACT:
A plating cell for plating a flat substrate, for example, a stamper for a high-density compact disk recording, employs a sparger to introduce a flow of electrolyte across the surface of the substrate to be plated. A fluid-powered rotary blade or wiper within the cathode chamber has a rotary blade with an edge spaced a small distance, preferably about three-eighths inch, from the substrate, and an annular turbine which rotates under a flow of the electrolytic fluid that is also being fed to the sparger. The rotary wiper is run at a speed between about 35 and 80 rpm and draws the electrolyte away from the substrate. This helps remove hydrogen bubble that form during electroplating. A semipermeable weir separates the cathode chamber from an anode chamber that contains an anode basket that is filled with plating material. The plating cell is provided with a backwash flow regime so that impurities and inclusions from the anode chamber are kept out of the plating bath.

REFERENCES:
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patent: 3788965 (1974-01-01), Holsinger
patent: 4269669 (1981-05-01), Soby et al.
patent: 4391694 (1983-07-01), Runsten
patent: 4435266 (1984-03-01), Johnston
patent: 4686014 (1987-08-01), Pellegrino et al.
patent: 5197673 (1993-03-01), Sullivan
patent: 5217536 (1993-06-01), Matsumura et al.
patent: 5514258 (1996-05-01), Brinket et al.

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