Plately alumina

Details Plately alumina Plately alumina

1993-03-08

1994-01-11

Bell, Mark L.

Abrasive tool making process, material, or composition

With inorganic material

Metal or metal oxide

51293, 423625, 501153, C09C 168

Patent

active

052777022

ABSTRACT:
A novel platey alumina with essentially no aggregates, fines or fragments has been obtained. This product proves very advantageous in lapping substrate wafers for microelectronic applications. A process for making such products is also described.

REFERENCES:
patent: 3121623 (1964-02-01), Nesin
patent: 4657754 (1987-04-01), Bauer et al.
patent: 4820498 (1989-04-01), Newkirk
patent: 4952389 (1990-08-01), Szymanski et al.
patent: 5190567 (1993-03-01), Tamamaki et al.
patent: 5196180 (1993-03-01), Hartshorn

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