Plate-like member conveying apparatus

Details Plate-like member conveying apparatus Plate-like member conveying apparatus

1991-10-30

1993-12-28

Chin-Shue, Alvin C.

Supports

Stand

To hold a particular article

2482951, 211 157, H01L 2100

Patent

active

052732444

ABSTRACT:
A plate-like members conveying apparatus includes a rotating shaft and five support arms for supporting semiconductor wafers. The arms are vertically stacked at equal intervals and parallel to each other. The middle arm is fixed between two intermediate arms. Above and below the intermediate arms, two outer arms are located. The intermediate arms are coupled to an intermediate arm pinion coaxially fixed to the rotating shaft. The outer arms are coupled to an outer arm pinion coaxially fixed to the rotating shaft and having twice diameter of the intermediate arm pinion. These two pinions are rotated together upon the rotation of the rotating shaft. By the rotation of the intermediate arm pinion, the intermediate arms are moved to opposite direction each other. By the rotation of the outer arm pinion, the outer arms are moved to opposite direction each other by a distance twice a distance between the intermediate arms. Thus, the interval between the adjacent two arms is changed while keeping the five arms at equal intervals.

REFERENCES:
patent: 3940174 (1976-02-01), Mayer

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