Plate-like member conveying apparatus

Details Plate-like member conveying apparatus Plate-like member conveying apparatus

1993-05-05

1995-06-13

Chin-Shue, Alvin C.

Supports

Stand

To hold a particular article

2482951, 211 157, H01L 2100

Patent

active

054235030

ABSTRACT:
A plate-like member conveying apparatus includes five holding arms arranged parallel to each other in one direction and capable of supporting wafers, a link mechanism for connecting said holding arms to each other and for, when at least one holding arm is moved in the one direction, moving the remaining holding arms such that the pitch thereamong is equal, and a nut-screw driving mechanism for moving the at least one holding arm in the one direction.

REFERENCES:
patent: 2779990 (1957-02-01), Van Den Bos
patent: 3940174 (1976-02-01), Mayes
patent: 4168006 (1979-09-01), Yamamoto

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