Plate-based microelectromechanical switch having a...

Details Plate-based microelectromechanical switch having a... Plate-based microelectromechanical switch having a...

2006-10-10

2006-10-10

Harrington, Alica M. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S292000, C359S295000

Reexamination Certificate

active

07119943

ABSTRACT:
A microelectromechanical system (MEMS) switch is provided which includes a multiple of three support arms extending from the periphery of a moveable electrode. In addition, MEMS switch includes a plurality of contact structures having portions extending into a space between a fixed electrode and the moveable electrode. In some cases, the relative arrangement of the support arms and the contact structures are congruent among three regions of the MEMS switch which collectively comprise the entirety of the fixed electrode and the entirety of the moveable electrode. In other embodiments, the contact structures may not be arranged congruently within the MEMS switch.

REFERENCES:
patent: 5526172 (1996-06-01), Kanack
patent: 5673785 (1997-10-01), Schlaak et al.
patent: 6143997 (2000-11-01), Feng et al.
patent: 6307452 (2001-10-01), Sun
patent: 6486425 (2002-11-01), Seki
patent: 2003/0202735 (2003-10-01), Dunec et al.
patent: 2004/0036132 (2004-02-01), de los Santos
patent: 1 321 957 (2003-06-01), None
International Search Report, PCT/US2005/029557, mailed Nov. 16, 2005.

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