Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1979-12-26
1982-07-20
Corbin, John K.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
G01B 1126
Patent
active
043403050
ABSTRACT:
First and second plates are formed with like periodic patterns. A laser beam illuminates the second plate through the alignment marks of the first plate to provide a pair of diffracted beams that are detected with alignment being indicated when the beams are of the same intensity.
REFERENCES:
patent: 4200395 (1980-04-01), Smith et al.
Austin Stewart S.
Flanders Dale C.
Smith Henry I.
Arnold Bruce Y.
Corbin John K.
Hieken Charles
Massachusetts Institute of Technology
Smith, Jr. Arthur A.
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