Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate
1999-05-21
2001-05-15
Mills, Gregory (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
Reexamination Certificate
active
06231717
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a plastic molding unsealing apparatus used for examination or quality check at a time of inferiority analysis by dissolving and removing a portion of a plastic molding such as a semiconductor chip, a condenser, a hybrid IC, or the like which has been sealed by plastic.
2. Description of the Related Art
Conventionally, there is known a plastic molding unsealing apparatus which dissolves and removes a portion of a plastic molded sample, such as a semiconductor chip, a condenser, a hybrid IC, or the like which has been sealed or encapsulated with plastic, by chemical liquid for exposing.
Among the conventional plastic molding unsealing apparatuses, there is conventionally one which unseals the sample using nitric acid. In the case of using nitric acid, since nitric acid does not corrode aluminum material used in an IC circuit, an excellent result is obtained.
However, in recent plastic moldings, ones which can not be dissolved by nitric acid have been rapidly increased, and concentrated sulfuric acid which has been heated at a high temperature is being used on such samples. In a plastic molding unsealing apparatus using such a heated concentrated sulfuric acid, the heated concentrated sulfuric acid is supplied to an unsealing processing portion of the plastic molding unsealing apparatus, and it is injected to a portion of the sample to be unsealed, thereby unsealing the portion.
In such a conventional art, however, since sulfuric acid is used, there is a problem that, in a case where the sulfuric acid contains water or moisture, aluminum material used in an IC circuit corrodes when the sulfuric acid contacts the IC circuit. Furthermore, another problem is that sulfuric acid itself has strong water absorbability and it absorbs moisture in the air when the sulfuric acid contacts the air in an unsealing processing.
SUMMARY OF THE INVENTION
The present invention has been achieved with such points in mind.
It therefore is an object of the present invention to provide a plastic molding unsealing apparatus which can accommodate various mold materials.
To achieve the object, according to a first aspect of the present invention, there is provided a plastic molding unsealing apparatus comprising: a first chemical liquid feeding means to take out each desired chemical liquid with a desired amount from chemical liquid bottles of at least two kinds; a liquid receiving container to temporarily receive the chemical liquid extracted from the first chemical liquid feeding means; a second chemical liquid feeding means to extract the chemical liquid, which has been received from the liquid receiving container with predetermined amount; a heating means to heat the chemical liquid extracted by the second chemical liquid feeding means; and a chemical liquid injecting section to inject the chemical liquid heated by the heating means onto a sample which has been sealed to be molded with plastic, thereby dissolving and unsealing a plastic portion of the sample to be unsealed, the chemical liquid injecting section recovering drain liquid of the heated chemical liquid.
Accordingly, the chemical liquid for dissolving the plastic molding is taken out with the predetermined amount by the first chemical liquid feeding means to be temporarily received in the liquid receiving container. At this time, in case of mixing and using the chemical liquids of two or more kinds are mixed and used, they are mixed in the liquid receiving container. The mixed chemical liquid is taken out with the predetermined amount by the second chemical liquid feeding means and heated by the heating means. The heated chemical liquid is injected onto the portion sample's of the portion to be unsealed, and the drain liquid is recovered.
According to a second aspect of the present invention, as it depends from the first aspect, there is provided a plastic molding unsealing apparatus, further comprising: pipes connected to the interior of the chemical liquid bottles, the interior of the first chemical liquid feeding means, the interior of the second liquid feeding means and the interior of the liquid receiving container, to block out the air; inert gas supplying means to supply inert gas to the pipes; and a switching valve to switch the pipes to supply the inert gas instead of the air when the chemical liquid is fed through the pipes.
Accordingly, the interior of the chemical liquid bottles and the pipes are sealed from the air when predetermined amounts of the chemical liquids are removed from the chemical liquid bottles by the first chemical liquid feeding means. Also the liquid receiving container and the pipes are sealed from the air when a predetermined amount of the chemical liquid is removed from the liquid receiving container by the second chemical liquid feeding means. Then, the inert gas is caused to flow into the liquid receiving container and the pipes instead of the air, and the chemical liquid in the pipes is completely fed into the pipes.
According to a third aspect of the present invention, as it depends from the first or the second aspect, there is provided a plastic molding unsealing apparatus, wherein the first chemical liquid feeding means is a first fixed delivery pump to feed the chemical liquid with a desired fixed mount; and wherein the second chemical liquid feeding means is a second fixed delivery pump to feed the chemical liquid with a desired fixed mount.
Accordingly, required chemical liquid is taken out from each chemical liquid bottle in a required amount by using the first fixed delivery pump which is the first chemical liquid feeding means and is supplied to the liquid receiving container. Also, required chemical liquid is removed from the liquid receiving container in a required amount by using the second fixed delivery pump which is the second chemical liquid feeding means and is supplied to the heating means. Therefore, a desired amount of each chemical liquid can be used.
According to a fourth aspect of the present invention, as it depends from one aspect among the first aspect to the third aspect, there is provided a plastic molding unsealing apparatus wherein the first chemical liquid feeding means is configured to selectively take out each chemical liquid from a plurality of chemical liquid bottles to feed the same to the liquid receiving container.
Accordingly, when chemical liquid of a kind is used alone from a plurality of chemical liquids, the first chemical liquid feeding means takes out a predetermined amount of chemical liquid from a desired chemical liquid bottle to feed the same into the liquid receiving container. Also, when a plurality of chemical liquids are mixed and used, the first chemical liquid feeding means takes out predetermined amounts of chemical liquids from a desired plurality of chemical liquid bottles to feed the same into the liquid receiving container.
According to a fifth aspect of the present invention, as it depends from the first aspect or the second aspect, there is provided a plastic molding unsealing apparatus wherein the liquid receiving container is used for mixing chemical liquids of two or more kinds which have been fed.
Accordingly, a plurality of kinds of chemical liquids which have been fed by the first chemical liquid feeding means are mixed in the liquid receiving container. As a result, a compound chemical liquid obtained by mixing desired chemical liquids can be used in the apparatus.
According to a sixth aspect of the present invention, as it depends from the first aspect or the second aspect, there is provided a plastic molding unsealing apparatus wherein the chemical bottles include at least a nitric acid bottle and a sulfuric acid bottle.
Accordingly, the nitric acid bottle containing nitric acid and the sulfuric acid bottle containing sulfuric acid are connected to the first chemical liquid feeding means, and nitric acid and/or sulfuric acid is fed by a predetermined amount(s) into the liquid receiving container to be used. As a result, one of only nitric acid
Hassanzadeh P.
Howard & Howard
Mills Gregory
Nippon Scientific Co., Ltd.
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