Liquid purification or separation – Structural installation – Closed circulating system
Patent
1989-05-12
1991-06-04
Dawson, Robert A.
Liquid purification or separation
Structural installation
Closed circulating system
156345, 210175, 2104161, 415 98, 4152171, 41742314, 41742315, 417DIG1, B01D 3531
Patent
active
050211510
ABSTRACT:
A semi-conductor etching system includes a tub for holding a corrosive fluid that is maintained at an elevated temperature and a weir basket which is located in the tub and is also adapted to hold the corrosive fluid. A pump and filtration unit is located in the tub and includes a one piece corrosion and high temperature resistant housing having a pump chamber, a filter chamber spaced from the pump chamber, an inlet port for allowing fluid to flow into the housing and an outlet port for allowing fluid to flow out of the housing. A fluid passage is provided in the housing for allowing fluid to flow between the pump chamber and the filter chamber. A pump impeller is housed in the pump chamber of the unit and a filter is housed in the filter chamber. The housing and the pump impeller include a plastic material which can withstand the corrosive action of the high temperature corrosive fluid. A pipe communicates the pump and filtration unit outlet port with the weir basket.
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Brochure Entitled CHEMKLEEN CF by WAFAB, Inc., No. CKE 10.1, Apr., 1986, Cl. 156/345.
Brochure entitled, FILTERCHEM, by Special Plastic Systems, No. 7/87, Cl. 156/345.
Dawson Robert A.
Drodge Joseph
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