Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2011-02-15
2011-02-15
Nguyen, Kiet T (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C359S355000
Reexamination Certificate
active
07888663
ABSTRACT:
A surface plasmonic polariton lens is disclosed that has an optical plate having incident thereupon waves of electromagnetic radiation. The plate also has a thin metal film of a metal having a negative permittivity. There are slits in the thin film, the slits being of decreasing radial width, and decreasing radial separation at increasing radius and being for the transmission therethrough of diffracted waves of the electromagnetic radiation. There are rings between the slits, the rings being of decreasing radial width at increasing radius and being for the transmission therethrough of evanescent waves of the electromagnetic radiation. The diffracted waves and the evanescent waves form propagated waves. A probe with such a lens, and an inspection apparatus and method using the probe are also disclosed.
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Fu Yongqi
Lim Enk Ng
Zhou Wei
Bracewell & Giuliani LLP
Nanyang Technological University
Nguyen Kiet T
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