Plasma treating method

Details Plasma treating method Plasma treating method

1996-10-08

1997-08-12

Pianalto, Bernard D.

Coating processes

Pretreatment, per se, or post-treatment, per se

427314, 427532, 427573, B05D 300

Patent

active

056563345

ABSTRACT:
The present invention is directed to a plasma treating apparatus, for generating plasma in a dielectric container and for treating the surface of a substrate with the plasma generated, which includes a hot air heating system for heating the dielectric container by blowing hot air to a central location on the outside surface of the dielectric container.
The present invention is further directed to a plasma treating method for generating plasma in a dielectric container and for,treating the surface of a substrate with the plasma generated which includes hot air heating for heating the dielectric container by blowing hot air to the outside surface of the dielectric container to a temperature at which a thin film does not deposit on the inside surface of the dielectric container.

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