Plasma synthesis of metal oxide nanopowder and apparatus...

Chemistry of inorganic compounds – Oxygen or compound thereof – Metal containing

Reexamination Certificate

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C423S608000, C423S610000, C423S592100, C502S300000, C502S350000

Reexamination Certificate

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06994837

ABSTRACT:
A process and apparatus for the synthesis of metal oxide nanopowder from a metal compound vapour is presented. In particular a process and apparatus for the synthesis of TiO2nanopowder from TiCl4is disclosed. The metal compound vapour is reacted with an oxidizing gas in electrically induced RF frequency plasma thus forming a metal oxide vapour. The metal oxide vapour is rapidly cooled using a highly turbulent gas quench zone which quickly halts the particle growth process, yielding a substantial reduction in the size of metal oxide particles formed compared with known processes. The metal compound vapour can also react with a doping agent to create a doped metal oxide nanopowder. Additionally, a process and apparatus for the inline synthesis of a coated metal oxide is disclosed wherein the metal oxide particles are coated with a surface agent after being cooled in a highly turbulent gas quench zone.

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