Plasma-resistant polymeric material, preparation thereof, and us

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...

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525512, 525398, 525 61, 525100, 525103, 525506, 525480, 522 28, 430175, 430176, 430270, 427340, G03C 842, B05D 304, C08F 842

Patent

active

049819097

ABSTRACT:
Plasma-resistant polymeric materials are prepared by reacting a polymeric material containing reactive hydrogen functional groups with a multifunctional organometallic material containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material, such as hexamethylcyclotrisilazane.

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