Plasma resistant member

Details Plasma resistant member Plasma resistant member

2006-08-15

2006-08-15

McNeil, Jennifer (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S699000, C428S702000, C428S469000

Reexamination Certificate

active

07090932

ABSTRACT:
A plasma resistant member has a base material and a coating layer made of an Y2O3, the coating layer being formed on a surface of the base material. The coating layer has a thickness of 10 μm or more and the Y2O3of the coating layer contains solid solution Si ranging from 100 ppm to 1000 ppm.

REFERENCES:
patent: 6284691 (2001-09-01), Bruce
patent: 10-045467 (1998-02-01), None
patent: 11-157916 (1999-06-01), None
patent: 2001051338 (2002-09-01), None
patent: 2001248463 (2003-02-01), None

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