Plasma resistant elastomer parts

Details Plasma resistant elastomer parts Plasma resistant elastomer parts

2005-09-20

2005-09-20

Wu, David W. (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

C524S543000, C524S544000, C524S435000

Reexamination Certificate

active

06946511

ABSTRACT:
Elastomeric parts having a magnetic flux density of at least 10 gauss on their surface deflect a portion of reactive plasmas from contact with the surface of the parts. Thus, such parts may be exposed to reactive plasmas for longer periods, with less degradation, than may similar elastomer parts that do not have such a magnetic flux density on their surface.

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patent: WO-00/74541 (2000-12-01), None

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