Plasma-resistant articles and production method thereof

Details Plasma-resistant articles and production method thereof Plasma-resistant articles and production method thereof

2005-08-23

2005-08-23

Sample, David (Department: 1755)

Compositions: ceramic

Ceramic compositions

Refractory

C216S109000

Reexamination Certificate

active

06933254

ABSTRACT:
A plasma-resistant article is provided in which a surface region of the article to be exposed to plasma in a corrosive atmosphere is formed from a zirconia-based ceramic that contains yttria in an amount of 7 to 17 mol %. The plasma-resistant article exhibits a sufficient resistance against exposure to plasma and is cost-effective. Preferably, the surface region has a centerline average roughness (Ra) of 1.2 to 5.0 μm, which is readily achieved through the use of an etching solution containing hydrofluoric acid. The present invention also provides a production method for such a plasma-resistant article.

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patent: 6645585 (2003-11-01), Ozono
Moulson et al., Electroceramics Material Properties Applcations, pp. 156-160, 1990.

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