Plasma Reactor with removable insert

Details Plasma Reactor with removable insert Plasma Reactor with removable insert

1987-04-24

1988-12-27

Terapane, John F.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

42218606, 422906, 204298, 156345, 2191214, 21912143, B01J 1908, C23C 1500, C23F 102

Patent

active

047939753

ABSTRACT:
A parallel plate plasma reactor is disclosed in which the lower electrode comprises a metal electrode having a central pedestal and an insert for surrounding the pedestal and holding wafers in contact with the pedestal or in position above the pedestal. The insert can comprise an insulator, such as ceramic, or a metal.

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patent: 4534816 (1985-08-01), Chen et al.
patent: 4585920 (1986-04-01), Houg et al.
patent: 4590042 (1986-05-01), Drage
patent: 4654106 (1987-03-01), Davis et al.

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