Electric heating – Metal heating – By arc
Patent
1984-10-09
1986-04-29
Paschall, M. H.
Electric heating
Metal heating
By arc
219121PD, 219121PG, 156345, B23K 900
Patent
active
045859205
ABSTRACT:
An improved plasma reaction chamber is described in which the interior electrode is readily removed. The interior electrode may comprise a variety of materials, including metallized plastic, thus enabling a disposable electrode and a greater variety of plasmas to be used.
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Hoog Josef T.
Mitzel James W.
Paschall M. H.
Tegal Corporation
Wille Paul F.
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