Plasma reactor chamber

Details Plasma reactor chamber Plasma reactor chamber

1990-12-24

1993-03-02

Bueker, Richard

Plastic and nonmetallic article shaping or treating: processes

Carbonizing to form article

Agglomeration or accretion

427569, 118723, 42218605, 42218606, C23C 1650

Patent

active

051907038

ABSTRACT:
The present invention includes a plasma reactor chamber, which is generally constructed such that a large opening exists in a wall of the chamber. The reactor chamber is deployed remotely from a control console, such as on a robotic arm. A plasma generating means, such as RF electrodes is disposed within the chamber and a flexible vacuum seal is engaged to the outer edge of the chamber wall, surrounding the opening. Operating components, such as a vacuum pump, plasma gas supply and RF generator are disposed within the control console, and various supply lines join the operating components to the reactor chamber. In operation, the reactor chambler is placed against a portion of a surface that is to be treated, and a low pressure plasma is created within the chamber to treat the zone of the surface enclosed within the seal of the chamber. Particularly shaped seals for irregularly shaped surfaces and a rolling seal for movement of the reactor chamber relative to a surface are within the contemplation of the invention.

REFERENCES:
patent: 3414702 (1968-12-01), Stauffer
patent: 3518484 (1970-06-01), Maskell
patent: 4520757 (1985-06-01), Nath
patent: 4641060 (1987-02-01), Dandl
patent: 4713585 (1987-12-01), Ohno et al.
patent: 4767641 (1988-08-01), Kieser et al.
patent: 4940521 (1990-07-01), Dinter et al.

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