Plasma reactor

Details Plasma reactor Plasma reactor

1996-12-23

1999-10-26

Breneman, Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118718, 118723R, 118730, 24236412, 2423642, 2423661, B01J 1908

Patent

active

059721600

ABSTRACT:
The invention relates to a plasma reactor for flexible strand material (12) , comprising passages (20,22) for the strand material (12) to enter into and exit from the reactor chamber (16), electrodes (54,56,58,60) arranged in the reactor chamber (16) for generating a plasma, and at least one guiding element arranged in the reactor chamber (16) and being adapted to guide the strand material (12) along a processing path. In order to provide a compact plasma reactor (10) for flexible strand material (12) which permits a uniform and gentle processing of the flexible strand material (12), it is provided, according to the invention, that at least one guiding element is a roller (24,26) about which the strand material (12) revolves in several windings axially offset with respect to each other, and that the electrodes (54,56,58,60) are arranged such that the plasma generated by them simultaneously acts on portions (62) of at least two windings axially offset with respect to each other.

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