Communications: radio wave antennas – Antennas – Loop type
Reexamination Certificate
2006-08-01
2006-08-01
Vo, Tuyet T. (Department: 2821)
Communications: radio wave antennas
Antennas
Loop type
C434S383000, C434S383000, C333S032000, C315S224000, C315S111510
Reexamination Certificate
active
07084832
ABSTRACT:
An RF driver circuit and an orthogonal antenna assembly/configuration, are disclosed as part of a method and system for generating high density plasma. The antenna assembly is an orthogonal antenna system that may be driven by any RF generator/circuitry with suitable impedance matching to present a low impedance. The disclosed RF driver circuit uses switching type amplifier elements and presents a low output impedance. The disclosed low-output impedance RF driver circuits eliminate the need for a matching circuit for interfacing with the inherent impedance variations associated with plasmas. Also disclosed is the choice for capacitance or an inductance value to provide tuning for the RF plasma source. There is also provided a method for rapidly switching the plasma between two or more power levels at a frequencies of about tens of Hz to as high as hundreds of KHz.
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Jones Day
Plasma Control Systems LLC
Vo Tuyet T.
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