Plasma processing system

Details Plasma processing system Plasma processing system

2003-08-28

2008-01-29

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

Reexamination Certificate

active

07322313

ABSTRACT:
A plasma processing apparatus M1is provided with a processing part20for supporting a pair of elongate electrodes30. The processing part20is provided with a plurality of pull bolts52(approach-deforming preventers) mutually spacedly arranged in the longitudinal direction of the electrode30. A head part of each pull bolt52is hooked on a rigid plate33through a bolt holder53, and a leg part thereof is screwed in the electrode30. Owing to this arrangement, the electrodes30can be prevented from being deformed by Coulomb's force.

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