Coating processes – Direct application of electrical – magnetic – wave – or... – Sonic or ultrasonic
Patent
1989-10-05
1993-02-09
Bell, Janyce
Coating processes
Direct application of electrical, magnetic, wave, or...
Sonic or ultrasonic
427249, 427255, 4272557, 427282, 427287, 427290, 427292, 427581, 427577, B05D 312, C23C 1600
Patent
active
051851792
ABSTRACT:
Carbonaceous films are coated on a surface by chemical vapor reation. In advance of the deposition of carbonaceous film, a silicon nitride film as coated on the surface to prevent interdiffusion between the carbonaceous film and the underlying surface.
REFERENCES:
patent: 4300989 (1981-11-01), Chang
patent: 4332837 (1982-06-01), Peyrl-Lavigne
patent: 4345985 (1982-08-01), Tohda et al.
patent: 4801474 (1989-01-01), Saitoh et al.
patent: 4925701 (1990-05-01), Jansen et al.
Katograda et al., "Large Area Chemical Vapour Deposition of Diamond Particles and Films Using Magneto-Microwave Plasma" in Japanese Journal of Applied Physics, vol. 26, No. 6, Jul. 1987.
Hayashi Shigenori
Ishida Noriya
Itou Kenji
Kadono Masaya
Kojima Masahiro
Bell Janyce
Semiconductor Energy Laboratory Co,. Ltd.
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