Plasma processing method and apparatus for performing...

Details Plasma processing method and apparatus for performing... Plasma processing method and apparatus for performing...

2006-04-04

2006-04-04

Hoang, Tu (Department: 3742)

Electric heating

Metal heating

By arc

C219S121540

Reexamination Certificate

active

07022937

ABSTRACT:
A plasma processing method is used to process a linear portion of an object to be processed by generating a linear plasma by supplying an electric power to an electrode provided at a plasma source or the object to be processed while supplying gas to the plasma source arranged in the neighborhood of the object to be processed and making activated particles generated by the plasma act on the object to be processed. The method includes detecting an inclination of the plasma source along a direction of an x-axis when the x-axis is taken in a linear direction of the linear portion of the object to be processed, andprocessing the linear portion of the object to be processed by the generated linear plasma by moving the plasma source along the x-axis direction while maintaining relative positions of the plasma source and the object to be processed so that the detected inclination of the plasma source becomes approximately zero.

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