Plasma processing installation, influenced by a magnetic...

Details Plasma processing installation, influenced by a magnetic... Plasma processing installation, influenced by a magnetic...

2011-02-08

2011-02-08

Paik, Sang Y (Department: 3742)

Electric heating

Metal heating

By arc

C422S186050

Reexamination Certificate

active

07884302

ABSTRACT:
An installation for the plasma processing of a continuous material (1) includes an evacuatable discharge chamber (3a, 3b) and a device for setting a gas atmosphere in the discharge chamber (3a, 3b). The device for setting a gas atmosphere includes a prechamber system (10, 11, 12) and a postchamber system (2), with sluice openings between the chambers (2, 3a, 3b, 10, 11, 12). The continuous material (1) is guided with low friction through the prechamber system (10, 11, 12) and the postchamber system (2). The device for setting a gas atmosphere includes a recovery system wherein gas can be recirculated from a postchamber (2a. . . 2k) into a prechamber (10, 11, 12) and/or postchamber (2a. . . 2k) having a higher pressure level so that processing is effected in a gas-saving manner.

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