Electric heating – Metal heating – By arc
Reexamination Certificate
2004-08-06
2009-02-17
Paschall, Mark H (Department: 3742)
Electric heating
Metal heating
By arc
C219S121400, C219S121440, C118S7230MW, C204S298380, C156S345370
Reexamination Certificate
active
07491908
ABSTRACT:
A plasma processing device comprises a chamber capable of maintaining an atmosphere depressurized less than atmospheric pressure, a transfer pipe connected to the chamber, a gas introduction mechanism for introducing a gas into the transfer pipe, and a microwave supply source for introducing a microwave from outside to inside of the transfer pipe. The plasma processing device can form a plasma of the gas in the transfer pipe and perform plasma processing on a workpiece placed in the chamber. The transfer pipe is connected to have an opening in an inner wall of the chamber, the inner wall being generally perpendicular to a major surface of the workpiece. The workpiece is not provided on direct line of sight from the plasma.
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Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Paschall Mark H
Shibaura Mechatronics Corporation
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