Plasma processing apparatus utilizing a surface wave plasma

Details Plasma processing apparatus utilizing a surface wave plasma Plasma processing apparatus utilizing a surface wave plasma

2005-10-11

2005-10-11

Vo, Tuyet Thi (Department: 2821)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230MW

Reexamination Certificate

active

06953005

ABSTRACT:
A dielectric window performs three functions, namely, (1) extraction of a microwave, (2) generation and transmission of a surface wave, and (3) keeping the vacuum. An O-ring, which keeps the vacuum between the dielectric window and a chamber, is arranged so as to surround the vicinity of a bottom plate1aof a microwave waveguide. Dielectric plates area arranged in parallel with each other in the dielectric window and performs only the transmission of a surface wave. The dielectric plates may be different from the dielectric window in at least one of a shape, a thickness, and a dielectric constant.

REFERENCES:
patent: 6388632 (2002-05-01), Murakawa et al.
patent: 6620290 (2003-09-01), Yamamoto et al.
patent: 6652709 (2003-11-01), Suzuki et al.
patent: 2000-348898 (2000-12-01), None

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