Signals and indicators – Indicators – Element wear type
Reexamination Certificate
2006-02-16
2009-02-10
Smith, R. A. (Department: 2841)
Signals and indicators
Indicators
Element wear type
C116S201000, C118S712000
Reexamination Certificate
active
07487738
ABSTRACT:
In a plasma processing apparatus capable of generating a plasma in a processing chamber accommodating therein a substrate to plasma-process the substrate, a component disposed in the processing chamber includes an identification indicia formed with one or more symbols indicated by arranging a plurality of dotted recesses on a surface of the component. The dotted recesses are of a substantially circular shape in a plane view and a substantial U-shape in a sectional view. The life span of the component can be detected based on a status of the identification indicia.
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Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Smith R. A.
Tokyo Electron Limited
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