Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1994-06-02
1995-02-21
Breneman, R. Bruce
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
C23F 142
Patent
active
053912527
ABSTRACT:
A plasma assembly including an RF head extending into a vacuum chamber and an associated electrode for generating a confined plasma. The assembly includes a sidewall within the chamber forming a plenum about the RF head. The plenum defines a volume substantially smaller than the volume of the chamber and hence, the gas pressure within the plenum is more easily monitored and controlled by the provision of make-up gas.
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Breneman R. Bruce
Chang Joni Y.
Denson-Low W. K.
Hughes Aircraft Company
Lachman M. E.
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