Plasma potential measuring method and apparatus, and plasma...

Details Plasma potential measuring method and apparatus, and plasma... Plasma potential measuring method and apparatus, and plasma...

2007-10-30

2007-10-30

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Using ionization effects

For analysis of gas, vapor, or particles of matter

Reexamination Certificate

active

10953113

ABSTRACT:
A plasma potential measuring method is conducted by: providing a measurement space surrounded by a radio-frequency electric field in plasma atmosphere; varying a floating potential at an electrode located in the measurement space by the ponderomotive effect acted only on electrons; and determining as a plasma potential a value of the floating potential at the time when an ion current flown into the electrode begins to lower.

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Kanji Fujita, “Plasma Potential Measurement by Emissive Probe”, Journal of Physics, Soc. of Japan, vol. 39, No. 5 (1984), pp. 366-369.

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