X-ray or gamma ray systems or devices – Source
Patent
1982-09-20
1985-08-20
Smith, Alfred E.
X-ray or gamma ray systems or devices
Source
378121, H01J 3500, H05B 3122
Patent
active
045368848
ABSTRACT:
A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma is repeatably generated in a first area directly from solid material without exploding the latter. X-rays are generated in a second area by passing high current through the plasma causing radial inward magnetic field pinching. Accurate control and improved intensity performance, and greater flexibility in selection of X-ray emitting materials, are provided by the separation of the plasma generating and the X-ray pinch generating functions. Common electrode structure is provided for plasma generating and for plasma pinching, which common electrode also provides a cylindrical plasma communication passage from the first to the second area, and provides an X-ray emission passage of desired axial orientation.
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Cartz Louis
Jaskolski Stanley V.
Schutten Herman P.
Spellman Gordon B.
Wackman, deceased Peter H.
Eaton Corporation
Grace C. H.
Grigsby T. N.
Smith Alfred E.
Vande Zande L. G.
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