Plasma oxidation

Details Plasma oxidation Plasma oxidation

1980-05-07

1982-04-06

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

118 501, 427 93, B05D 306

Patent

active

043235891

ABSTRACT:
Plasma oxidation of the surface of a substrate which surface does not face towards the plasma is achieved by placing the substrate perpendicular to the plasma in a region at a pressure of at least about 10 mtorr.

REFERENCES:
patent: 3108900 (1963-10-01), Papp
patent: 3650929 (1972-03-01), Lertes
patent: 4138306 (1979-02-01), Niwa
patent: 4178877 (1979-12-01), Kudo
patent: 4232057 (1980-11-01), Ray et al.

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