Plasma monitor

Details Plasma monitor Plasma monitor

1982-11-29

1986-02-11

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

156626, 2504581, 356316, G01J 3443, G01N 2164

Patent

active

045695920

ABSTRACT:
A plasma monitor which measures the distribution of particular chemical species (atom, molecule, ion) in plasma generated inside an instrument making use of the plasma. Laser light having a particular wavelength is radiated to the particular chemical species so as to let it generate fluorescence. The fluorescence is picked up for each of a plurality of zones divided in the radiating direction of the laser light and the construction of the chemical species in each zone is determined on the basis of the intensity of the fluorescence in each zone in order to determine the concentration distribution of the particular chemical species contained in the plasma. The operative condition within the sealed vessel can be grasped more accurately by measuring the distribution of the concentration of the chemical species which is closely related with the condition of deposition or etching.

REFERENCES:
patent: 4394237 (1983-07-01), Donnelly et al.
Donnelly et al., J. Vac. Sci. Technol., vol. 21, No. 3, Sep./Oct. 1982, pp. 817-823.

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