Plasma ion source mass analyzer

Details Plasma ion source mass analyzer Plasma ion source mass analyzer

1997-05-15

1998-09-08

Berman, Jack I.

Radiant energy

Ionic separation or analysis

With sample supply means

H01J 4904

Patent

active

058048219

ABSTRACT:
A plasma ion source mass analyzer composed of: a plasma ion source for ionizing a sample in a plasma; a vacuum vessel; a sampling cone and a schema cone each having a front end provided with a hole for passage into the vacuum vessel of a beam of ions generated in the plasma, the holes in the cones defining an inlet axis of the beam; a mass filter disposed in the vacuum vessel for mass-separating ions in the beam; an ion lens disposed in the vacuum vessel to lead ions in the beam to the mass filter, the ion lens having an entrance which subtends a solid angle relative to a point in the hole of the schema cone; an extraction electrode disposed in the vacuum vessel between the schema cone and the ion lens to lead ions passing through the schema cone to the ion lens; a gate valve disposed between the extraction electrode and the ion lens; a detector set in the vacuum vessel to detect ions which pass through the mass filter; and a diaphragm mounted within the extraction electrode for narrowing the beam which passes through the hole in the schema cone to cause the beam to subtend a solid angle, relative to the point in the hole of the schema cone, which is less than the solid angle subtended by the entrance of the ion lens.

REFERENCES:
patent: 5051584 (1991-09-01), Gray et al.
patent: 5559337 (1996-09-01), Ito et al.
patent: 5565679 (1996-10-01), Tanner et al.

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