Plasma generator utilizing dielectric member for carrying microw

Details Plasma generator utilizing dielectric member for carrying microw Plasma generator utilizing dielectric member for carrying microw

1989-12-27

1991-06-11

Kyle, Deborah L.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

427 38, 219 1055R, 20415743, B01J 1908

Patent

active

050230565

ABSTRACT:
A plasma generator utilizes a dielectric member for carrying microwave energy from a microwave source directly into the hot zone of a thermally heated semiconductor process reaction chamber. The member carries the microwave energy much like fiber optics carries light so that the microwave energy may be delivered to and emitted at a specific preselected position within the chamber. A plasma can be formed and located directly over or near substrates so that a more highly controlled deposition and/or etching process may take place.

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Aklufi, M. E. et al., Diamond Growth Using Plasmas Formed with Dielectricy Guided Microwaves, pp. 114-121, May 7-12 1989, Los Angeles, CA.
Kamo, M. et al., Diamond Synthesis from Gas Phase in Microwave Plasma (possibly published in "Crystal Growth"), pages unknown, possibly 1982, place of publication unknown.
Publication/Advertisement, Microwave Plasma Systems for Diamond Film Research, May 16, 1988, Nov. 15, 1988, Jan. 15, 1989.

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