Plasma generator

Details Plasma generator Plasma generator

2007-09-25

2007-09-25

Paschall, Mark (Department: 3742)

Electric heating

Metal heating

By arc

C219S121520, C219S121480, C355S111000, C422S080000

Reexamination Certificate

active

10344345

ABSTRACT:
A microfabricated plasma generator and a method of generating a plasma, the plasma generator comprising: a substrate chip; a chamber defined by the substrate chip, the chamber including an inlet port through which analyte is in use delivered, an outlet port and a plasma-generation region in which a plasma is in use generated; and first and second electrodes across which a voltage is in use applied to generate a plasma in the plasma-generation region.

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