Plasma generation apparatus and work processing apparatus

Details Plasma generation apparatus and work processing apparatus Plasma generation apparatus and work processing apparatus

2011-07-12

2011-07-12

Hassanzadeh, Parviz (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

C118S7230MW, C219S121480, C219S121500

Reexamination Certificate

active

07976672

ABSTRACT:
A plasma generation apparatus is provided which includes: a microwave generation portion which generates a microwave; a gas supply portion which supplies a gas to be turned into plasma; a plasma generation nozzle which includes a reception member receiving the microwave, and turns the gas into plasma based on the energy of the received microwave and emits the plasma gas; and a photo-detection unit which detects light emitted by the plasma gas and generates electrical information.

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