Electric heating – Metal heating – By arc
Reexamination Certificate
2007-06-05
2007-06-05
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121410, C219S121480, C219S121570, C156S345380
Reexamination Certificate
active
10430415
ABSTRACT:
Plasma-assisted methods and apparatus that use multiple radiation sources are provided. In one embodiment, a plasma is ignited by subjecting a gas in a processing cavity to electromagnetic radiation having a frequency less than about 333 GHz in the presence of a plasma catalyst, which may be passive or active. A controller can be used to delay activation of one radiation source with respect to another.
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pat
Kumar Devendra
Kumar Satyendra
BTU International Inc.
Paschall Mark
Weingarten Schurgin, Gagnebin & Lebovici LLP
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