Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2011-04-12
2011-04-12
Souw, Bernard E (Department: 2881)
Coating apparatus
Gas or vapor deposition
With treating means
C118S7230DC, C219S121500, C219S121360
Reexamination Certificate
active
07921804
ABSTRACT:
The present invention provides a plasma generating system that includes: a microwave generator for generating microwave energy; a power supply connected to the microwave generator for providing power thereto; a microwave cavity; a waveguide operatively connected to the microwave cavity for transmitting microwave energy thereto; an isolator for dissipating microwave energy reflected from the microwave cavity; and at least one nozzle coupled to the microwave cavity. The nozzle includes: a housing having a generally cylindrical space formed therein, the space forming a gas flow passageway; a rod-shaped conductor disposed in the space and operative to transmit microwave energy along a surface thereof so that the microwave energy excites gas flowing through the space; and an impedance controlling structure which adjusts the impedance of the nozzle.
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Amarante Technologies, Inc.
Jordan and Hamburg LLP
Saian Corporation
Souw Bernard E
LandOfFree
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