Plasma generating apparatus using microwave

Details Plasma generating apparatus using microwave Plasma generating apparatus using microwave

2005-04-19

2005-04-19

Paschall, Mark (Department: 3742)

Electric heating

Metal heating

By arc

C219S121430, C356S450000, C156S345440, C118S7230MW

Reexamination Certificate

active

06881922

ABSTRACT:
The present invention uses as a detector for adjustment measurement, monodyne interference between a microwave for plasma generation and the reflected wave. Analysis of the interference wave that is obtained using monodyne interference allows finding of the phase difference between the incident and the reflected wave and the amplitude of that reflected wave; and controlling of an excited microwave generation/control system based on them allows impedance matching between the excited microwave and the plasma. This method allows very high precision phase detection, and calculation of the characteristics of the plasma based on the detected phase shift. Therefore, it is possible to distinguish noises even in the vicinity of the matched region.

REFERENCES:
patent: 3875399 (1975-04-01), Teich
patent: 5187672 (1993-02-01), Chance et al.
patent: 6141136 (2000-10-01), Kalibjian
patent: 6240305 (2001-05-01), Tsuchiya
patent: 09297178 (1997-11-01), None

Affiliated with

Also associated with

Rating

Plasma generating apparatus using microwave does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Plasma generating apparatus using microwave, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Plasma generating apparatus using microwave will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3422765