Electric heating – Metal heating – By arc
Patent
1995-06-19
1997-08-26
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912141, 20429816, 20429837, B23K 1000
Patent
active
056607440
ABSTRACT:
A surface processing apparatus comprises a container provided with a first electrode and a second electrode disposed opposite to the first electrode for supporting a substrate to be processed and filled with a gas at a reduced pressure, an electric field generator for generating an electric field between the first and second electrodes, and a magnetic field generator for generating a magnetic field in the vacuum container. The magnetic field generator comprises a plurality of magnet element groups arranged in a circle around the container so as to form a ring, each of the magnet element groups having an axis directed to a center of the circle and a synthetic magnetization direction and comprising one or a plurality of magnet elements having respective magnetization directions which are synthesized to be equal to the synthetic magnetization direction of the each of the magnetic element groups. One of the magnet element groups is so disposed that the synthetic magnetization direction thereof coincides with the axis thereof, and each of the magnet element groups other than the one magnet element group is so disposed that an angle of the synthetic magnetization direction thereof relative to the synthetic magnetization direction of the one magnet element group is substantially twice an angle of the axis thereof relative to the axis of the one magnet element group.
REFERENCES:
patent: 4552639 (1985-11-01), Garrett
patent: 4580098 (1986-04-01), Gluckstern et al.
patent: 4600492 (1986-07-01), Ooshio et al.
patent: 5081398 (1992-01-01), Asmussen et al.
patent: 5203959 (1993-04-01), Hirose et al.
patent: 5245157 (1993-09-01), Ohiwa
patent: 5252194 (1993-10-01), Demaray et al.
patent: 5266146 (1993-11-01), Ohno et al.
patent: 5304279 (1994-04-01), Coultras et al.
"Design of Permanent Multipole Magnets With Oriented Rare Earth Cobalt Material," Halbach, K., Nuclear Instruments and Methods, 169, pp. 1-10, (1980).
"Permanent Magnet Systems For NMR Tomography," Zijlstra, H., Philips Journal of Research, vol. 40, No. 5, pp. 259-288, (1985).
"Gate Oxide Breakdown Phenomena In Magnetized Plasma," Sekine et al., Dry Process Symposium, ULSI Research Center, Toshiba Corp., pp. 99-103, (1991) .
Hasegawa Isahiro
Horioka Keiji
Narita Masaki
Okano Haruo
Okumura Katsuya
Kabushiki Kaisha Toshiba
Paschall Mark H.
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